| 摘要 |
PROBLEM TO BE SOLVED: To provide a forming method of contacts with a yield ratio improved through prevention of breaking of a conductive part due to rugged parts of a contact hole formed at a resonator with the use of etching, and to provide a resonator structure, and an EL device equipped with the structure. SOLUTION: The contact 25 for electrically connecting a lower conductive part 236 with an upper conductive part 242, made of conductive material, covering inner wall face of a contact hole 20, is formed by forming the contact hole having rugged parts 15 on an inner wall face of a resonator 10 formed by laminating a plurality of dielectric layers 10a, 10b different from each other, arranged between the lower conductive part 236 and the upper conductive part 242 by etching. The resonator 10 is formed on the lower conductive part 236, and the contact hole 20 is formed on the resonator 10 by etching. Then, the inner wall face of the contact hole 20 is to be covered with the conductive material with a thickness of not less than 150% of the height of a convex part against a concave part of the rugged part 15 to form the contact 25. COPYRIGHT: (C)2006,JPO&NCIPI
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