发明名称 Process for producing high quality large size silicon carbide crystals
摘要 The invention is an improvement in the method of producing a high quality bulk single crystal of silicon carbide in a seeded sublimation system. In a first embodiment, the improvement comprises reducing the number of macrosteps in a growing crystal by incorporating a high concentration of nitrogen atoms in the initial one (1) millimeter of crystal growth.
申请公布号 US2006118037(A1) 申请公布日期 2006.06.08
申请号 US20040006997 申请日期 2004.12.08
申请人 POWELL ADRIAN;TSVETKOV VALERI F;BRADY MARK;LEONARD ROBERT T 发明人 POWELL ADRIAN;TSVETKOV VALERI F.;BRADY MARK;LEONARD ROBERT T.
分类号 C30B23/00;C30B25/00;C30B28/12;C30B28/14 主分类号 C30B23/00
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