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发明名称
VERFAHREN ZUR HERSTELLUNG EINER FÜR DISSOZIATION AUSGELEGTEN BELASTETEN STRUKTUR
摘要
申请公布号
DE60305067(D1)
申请公布日期
2006.06.08
申请号
DE20036005067
申请日期
2003.12.08
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE, PARIS
发明人
FOURNEL, FRANCK;MORICEAU, HUBERT;LAGAHE, CHRISTELLE
分类号
H01L21/762;H01L21/20;H01L21/304
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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