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发明名称
HEISSE PLATTE
摘要
申请公布号
DE60112033(T2)
申请公布日期
2006.06.08
申请号
DE20016012033T
申请日期
2001.06.15
申请人
IBIDEN CO.,LTD.
发明人
HIRAMATSU, YASUJI;ITO, YASUTAKA
分类号
H01L21/02;H05B3/20;C04B35/581;C04B35/584;C23C14/50;C23C16/46;H01L21/00;H01L21/66;H01L21/68;H05B3/10;H05B3/14;H05B3/16;H05B3/18;H05B3/26;H05B3/28;H05B3/68;H05B3/74
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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