发明名称 CORRECTING METHOD OF SENSOR DATA AND INTERLOCK EVALUATING METHOD OF INTERLOCK SYSTEM
摘要 <p><P>PROBLEM TO BE SOLVED: To provide the correcting method of sensor data and the interlock evaluating method of an interlock system, which simplify the setting and control of the interlock to facilities of the same kind through a statistical drift-corrected algorithm to more correctly judge whether there is any abnormality of the facilities. <P>SOLUTION: The correcting method of the sensor data includes steps of: setting predetermined drift upper limit value and drift lower limit value; creating reference pattern information to a reference model; determining whether the sensor pattern information meets the drift upper limit value and the drift lower limit value; calculating a drift offset on the basis of the reference pattern information and sensor pattern information if the sensor pattern information meets the drift upper limit value and drift lower limit value; and correcting the sensor data on the basis of the calculated drift offset. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006148070(A) 申请公布日期 2006.06.08
申请号 JP20050290468 申请日期 2005.10.03
申请人 SAMSUNG ELECTRONICS CO LTD 发明人 LEE SEUNG-JUN;KIM HAK-YONG;DOH SEUNG-YONG;PARK CHANG-HUN;JANG YOO-SEOK
分类号 H01L21/66;G01B11/24;H01L21/02 主分类号 H01L21/66
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