发明名称 STRUCTURE AND MANUFACTURING METHOD OF SEMICONDUCTOR STORAGE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor storage device of a memory cell area smaller than a minimum memory cell area specified by a minimum processing size on a manufacturing process by using the smaller number of photographing processes, and to provide a method of manufacturing the semiconductor storage device. <P>SOLUTION: The semiconductor storage device of a cross-point structure provided with a plurality of upper electrodes 2 extending in the same direction and a plurality of lower electrodes 1 extending in a direction crossing orthogonally the extending direction of the upper electrodes 2 to form a storage material for accumulating data in layers between the upper electrodes 2 and the lower electrodes 1. The storage material is formed of a perovskite material, and formed to extend along the upper electrodes 2 to the side of the lower electrodes 1 of the respective upper electrodes 2. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006147694(A) 申请公布日期 2006.06.08
申请号 JP20040333130 申请日期 2004.11.17
申请人 SHARP CORP 发明人 ONISHI TETSUYA;NIIMURA NAOYUKI;YAMAZAKI NOBUO;SHIBUYA TAKAHIRO;NAKANO TAKASHI;TAJIRI MASAYUKI;ONISHI SHIGEO
分类号 H01L27/105;H01L43/08 主分类号 H01L27/105
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