| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezo-electric/electrostrictive device in which the attenuation of the vibration of a thin diaphragm part is prevented effectively and which maintains displacement (magnitude) highly and is excellent in response and which is detectable with high precision (high resolution, high sensitivity). <P>SOLUTION: The piezo-electric/electrostrictive device includes a ceramic substrate 1 which has a frame-like thick walled part 11 and a thin diaphragm part 12 and in which a cavity 13 which communicates with outside by the thick walled part 11 and the thin diaphragm part 12, and a piezo-electric/electrostrictive device 2 having a layer structure including a lower electrode 21, a piezo-electric/electrostrictive film 22 and an upper electrode 23. Further, the thin diaphragm part 12 is made to have an arch shape of convex outward. And, the piezo-electric/electrostrictive device 2 is made to have an arch shape of convex outside, and the piezo-electric/electrostrictive device 2 is made so that a tensile stress F parallel to the fixed surface with the thin diaphragm part 12 is made to remain in its interior. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
