| 摘要 |
PROBLEM TO BE SOLVED: To correct beam position in response to a change of the beam condition in a device for correcting a beam position. SOLUTION: The device 1 is provided with a beam displacing means 23 for displacing beam position to correct the beam, and a correcting means 10 for correcting beam position by adjusting beam displacement quantity of the beam displacing means 23. The correcting means 10 corrects beam position in response to a change of the beam condition by determining beam displacement quantity in response to the beam condition on the basis of relation between the beam condition and the beam position correction quantity and by displacing the beam on the basis of the previously obtained relation between the beam condition and the beam position correction quantity. COPYRIGHT: (C)2006,JPO&NCIPI
|
