ALIGNER, PROJECTION OPTICAL SYSTEM THEREOF, AND METHOD OF MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a projection optical system of a refracting system, which is capable of realizing an improvement in NA and a restriction on a size increase (diameter increase) simultaneously and making an aberration correction well.

SOLUTION: The projection optical system of the aligner projects the optical image of an object OP on an imaging surface IP as the optical image is reduced in size. The above projection optical system is configured so as to include two or more refractive members L1 to L39 but to exclude reflective members having an optical power substantially. The projection optical system is also configured so as not to form an intermediate image IM in the optical system itself.

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