| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a large pellicle in which a pellicle can be removed from an exposure original plate without using a solvent or the like and without causing cohesion failure of a pressure-sensitive adhesive. <P>SOLUTION: The pellicle comprises a rectangular pellicle frame having an upper end face and a lower end face and over 30 cm length in one side, a pellicle film stretched over the upper end face of the pellicle frame, and a pressure-sensitive adhesive layer on the lower end face to adhere the pellicle frame to an exposure original plate. The pressure-sensitive adhesive layer has a certain level of cohesion fracture strength not to induce cohesion failure in the pressure-sensitive adhesive layer when the pressure-sensitive adhesive layer is stripped from the pellicle frame or from the exposure original plate. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
