摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multilayer ceramic element in which deformation of a through hole can be suppressed in burning. <P>SOLUTION: Since the underside region in through hole (TH) 13 is filled with a conductive member 14 in a multilayer ceramic element 1, contraction of the conductive member 14 is reduced in burning as compared with a case where the entire region in the TH is filled with a conductive member. Furthermore, an air gap is formed in the region S not filled with a conductive member within the TH 13. Consequently, even if the conductive member 14 contracts to some extent at the time of burning, gas such as air expands in the air gap to apply a pressure uniformly to the inner surface 13a of the TH 13 through the conductive member 14 thus limiting deformation of the TH 13. <P>COPYRIGHT: (C)2006,JPO&NCIPI |