| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp device capable of simplifying configuration by dispensing with a light take-out window sectioning a lamp house and an irradiated region to reduce a cost, preventing a power supply member located in the vicinity of a lamp end from being exposed to active oxygen to prevent oxidization, and reducing the deterioration of the member or generation of the damage. SOLUTION: The excimer lamp device includes an excimer lamp for radiating ultraviolet light by discharge via a dielectric substance and the lamp house for storing the excimer lamp. An aperture for taking out the radiated light from the lamp is formed on the lamp house, and the internal space of the lamp house communicates with the internal space of a processing chamber where a substance to be processed is processed through the aperture. A power supply coupling is formed of the power supply member connected with at least one of ends of the excimer lamp. A partitioning member for partitioning a lamp end region having the power supply coupling formed and the internal space of the lamp house is provided inside the lamp house. COPYRIGHT: (C)2006,JPO&NCIPI
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