| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for performing cleaning without causing any damage on a nozzle plate. SOLUTION: Since a small drop of cleaning liquid 23 reaches a nozzle hole 12 arranged on a cleaning hole 29 and residue remaining in the nozzle hole 12 is swollen and dissolved into the cleaning liquid 23 before jet gas is blown to the nozzle hole 12, the residue is removed easily together with the cleaning liquid 23. Since a nozzle plate 15 does not touch a blade, or the like, the nozzle hole 12 and the periphery thereof are not damaged. When a high boiling point solvent is used as the cleaning liquid 23, cleaning process can be carried out in safety. COPYRIGHT: (C)2006,JPO&NCIPI
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