发明名称 Certified cells and method of using certified cells for fabricating a device
摘要 A method of using a cell library to create a device, includes projecting a series of masks, each mask of the series corresponding to a layer of each of one or more selected cells, onto a substrate according to a data layout of the device or combining a series of masks, each mask of the series corresponding to a layer of one or more of the selected cells, into a series of global masks, each of global masks of the series of global masks embodying a layer of the device according to a data layout of the device.
申请公布号 US2006119814(A1) 申请公布日期 2006.06.08
申请号 US20040002459 申请日期 2004.12.03
申请人 ASML NETHERLANDS B.V. 发明人 DAVID CUMMINGS KEVIN
分类号 G03B27/42 主分类号 G03B27/42
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