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发明名称
Filme mit niedriger Dielektrizitätskonstante und Herstellungsverfahren für diese Filme sowie elektronische Bauteile, die diese Filme verwenden
摘要
申请公布号
DE112004001324(T5)
申请公布日期
2006.06.08
申请号
DE200411001324
申请日期
2004.06.25
申请人
RORZE CORP., HIROSHIMA;JAPAN SCIENCE AND TECHNOLOGY AGENCY, KAWAGUCHI
发明人
分类号
H01L21/314
主分类号
H01L21/314
代理机构
代理人
主权项
地址
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