SUBSTRATE TRANSFER APPARATUS, METHOD FOR REMOVING THE SUBSTRATE, AND METHOD FOR ACCOMMODATING THE SUBSTRATE,申请号KR20030085602-传众专利搜索

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发明名称	SUBSTRATE TRANSFER APPARATUS, METHOD FOR REMOVING THE SUBSTRATE, AND METHOD FOR ACCOMMODATING THE SUBSTRATE
摘要
申请公布号	KR100586354(B1)	申请公布日期	2006.06.08
申请号	KR20030085602	申请日期	2003.11.28
申请人		发明人
分类号	H01L21/677;B65D85/48;B65G49/06;H01L21/673;H01L21/68;H01L21/687	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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