| 摘要 |
The positioning device comprises at least one displaceable carriage ( 10 ), liquid slide bearings ( 12 a , 16 a; 12 b, 16 b) on which the carriage is displaceable, and a carriage drive. The latter comprises a first linear motor comprising a first primary part ( 20 a) and a first secondary part ( 21 a) that is opposite thereto and located in a first plane ( 19 a), and a second linear motor comprising a second primary part ( 20 b) and a second secondary part ( 21 b) that is opposite thereto and located in a second plane ( 19 b). The two linear motors are arranged in inclined positions such that the two planes are different and form an intersecting angle.
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