Transfer device for microsystem `s laminar substrate in processing system, has transfer mechanism with articular arm whose end part carries adjustable temporary storage as hand or gripper part, where storage is integral part of mechanism

摘要

The device has a docking station (1) for transport boxes in which laminar substrates are stackable to one another. A substrate transfer mechanism (3) is provided in the station and clutched in the boxes. An adjustable temporary storage (14) provided for the substrates is an integral part of the mechanism. The mechanism has an articular arm whose end part carries the storage (14) as a hand or gripper part.