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发明名称
THIN FILM PROCESSING METHOD AND SYSTEM
摘要
申请公布号
KR100586390(B1)
申请公布日期
2006.06.08
申请号
KR20030097286
申请日期
2003.12.26
申请人
发明人
分类号
H01L21/205;C23C16/56;H01J37/317;H01L21/00;H01L21/02;H01L21/263;H01L21/312
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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