摘要 |
<P>PROBLEM TO BE SOLVED: To provide a load sensor excellent in detection precision over a wide temperature range. <P>SOLUTION: This load sensor has a piezoresistance element comprising a matrix comprising ZrO<SB>2</SB>added with Y<SB>2</SB>O<SB>3</SB>, and a piezoresistance effect material comprising La<SB>1-X</SB>Sr<SB>X</SB>TiO<SB>3+y</SB>(0.03≤x≤0.40, -0.2≤y≤1.0) dispersed in the matrix. The load sensor of the present invention is the load sensor excellent in the detection precision over the wide temperature range. <P>COPYRIGHT: (C)2006,JPO&NCIPI |