| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe device free from damaging a sample in changing of a probe. SOLUTION: Of the probe device provided with a probe 1 for detecting sample information, a probe retaining member 2 for retaining the probe 1 at a tip part 2b, and a support member 3 for supporting a base end part 2a of the probe retaining member 2, the probe retaining member 2 is made free to move between a detecting position of the sample information and a shelter position from the sample 10 with its base end part 2a as a fulcrum. With this, exchanging of the probe 1 can be made with the probe retaining member 2 at the shelter position, so that the sample 10 will never be damaged. COPYRIGHT: (C)2006,JPO&NCIPI
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