METHOD OF MANUFACTURING SUBSTRATE WITH CONCAVE PORTION, SUBSTRATE WITH CONCAVE PORTION, MICROLENS SUBSTRATE, TRANSMISSION SCREEN, AND REAR PROJECTOR

摘要

PROBLEM TO BE SOLVED: To provide a microlens substrate appropriately applicable to production of a transmission screen which can effectively prevent moire due to interference of light from being generated and has excellent angle of visibility characteristics, and a manufacturing method capable of efficiently manufacturing a substrate with concave portions used for manufacturing of the microlens substrate. SOLUTION: The method of manufacturing the substrate with the concave portions used for manufacturing the microlens substrate including microlenses. includes the steps of: coating the substrate with a mask; forming a plurality of openings in the mask; and forming the plurality of the concave portions by etching the base substrate coated with the mask formed with the openings. The concave portions are flat-shaped and the plurality of concave portions are arrayed in a houndstooth check manner. Further, in the case where the depth of each of the concave portions is defined as Dμm and the value obtained by dividing the difference between the length of each of the formed concave portions in a long axis direction and the diameter of each of the formed openings by two is defined as Sμm, then D and S satisfy the relation: 0.90≤S/D≤1.40. COPYRIGHT: (C)2006,JPO&NCIPI