| 摘要 |
PROBLEM TO BE SOLVED: To improve operability by alleviating a load to a focusing mechanism irrespective of size of weight to be added on a stage. SOLUTION: When transmitted illumination observation is performed, a transmitted illumination system 44 is installed, when vertical illumination observation is performed by loading large weight to the focusing mechanism 26 by a sample 25 and the stage 28, the transmitted illumination system 44 is detached and a spring unit 70 which provides drag according to the weight of the sample 25 and the stage 28 to be added to the focusing mechanism 26 is attached via the stage 28. COPYRIGHT: (C)2006,JPO&NCIPI
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