DEVICE FOR CONTROLLING MICROMOTION OF LIQUID

摘要

PROBLEM TO BE SOLVED: To provide a device for controlling the micromotion of a liquid in which a gas-liquid boundary can be formed with high precision and to which dust, particles and other impurities are not stuck. SOLUTION: This device for controlling the micromotion of the liquid is formed by connecting a silicon substrate 11 to a glass substrate 16 by using an anodic connection method. First and second grooves 12, 13 different in depth are formed on the silicon substrate 11 as a flow passage 17 through which the liquid is made to flow. The portion of the glass substrate 16 to be opposed to the silicon substrate 11 is connected spatially to the flow passage. A narrow space 17a is formed in the portion narrower than either of the depth and width of the flow passage 17. A water-repellent metallic film 14 is formed in the narrow space 17a on the side of the silicon substrate 11. COPYRIGHT: (C)2006,JPO&NCIPI