METHOD AND APPARATUS FOR FORMING PLURALITY OF LASER BEAMS WITH WAVELENGTHS IN ULTRAVIOLET REGION, AND LASER MACHINING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for forming a plurality of laser beams with wavelengths in the ultraviolet ray region, for which the maintenance inspection is easily conducted and in which machining efficiency is improved, and at the same time, whose running cost is reduced by preventing deterioration of the wavelength converting means, and also provide a method thereof, and a laser machining device.

SOLUTION: A laser beam 2a which is output from a laser oscillator 1 and of which the wavelength is in the near infrared region is branched into a plurality of laser beams 2ad with a laser distributing device 9. A portion of the branched laser beams 2ad is converted into laser beams 2bd with the wavelength being a half of that of the laser beam 2a with a wavelength conversion element 3. Ultraviolet laser beams 2td with the wavelength being a third of that of the laser beam 2a are formed out of the laser beams 2ad and 2bd output from the wavelength conversion element 3 with a wavelength conversion element 4. Then the ultraviolet laser beam 2td is drawn out with a wavelength separation element 5 and is supplied to the machining section.

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