| 摘要 |
PROBLEM TO BE SOLVED: To obtain a means for substantially equalizing the frequency temperature characteristics of an SH type surface acoustic device to those of a surface acoustic device employing a Rayleigh wave. SOLUTION: At least one IDT electrode of an alloy principally comprising aluminum is arranged on a crystal substrate of Euler angle (0°, 110°-150°, 90°±2°) and an SiO<SB>2</SB>film is stuck to cover the IDT electrode thus obtaining an SH type surface acoustic device. The SH type surface acoustic device is constituted by setting the standardized thickness of the SiO<SB>2</SB>film in the range of 1.7%-3.0%. COPYRIGHT: (C)2006,JPO&NCIPI
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