| 摘要 |
PROBLEM TO BE SOLVED: To easily form a variable capacitance element provided with a movable portion, which is an MEMS element, in a sealed state. SOLUTION: This variable capacitance element is provided on a semiconductor substrate 101 formed of silicon etc. via an insulating layer 102, and comprises a fixed electrode 103, a plate-like movable electrode 104 disposed above the fixed electrode 103 oppositely thereto and apart therefrom by a predetermined distance, a plurality of spring beams 105 whose one-side ends are connected to the movable electrode 104, and a plurality of anchors 106 formed on the insulating layer 102 around the fixed electrode 103. Further, a side wall frame 110 is formed in a form to surround the periphery of the variable capacitance element, and a ceiling wall 111 is formed on the side wall frame 110. A package surrounding the variable capacitance element is formed of the side wall frame 110 and the ceiling wall 111. COPYRIGHT: (C)2006,JPO&NCIPI
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