| 摘要 |
PROBLEM TO BE SOLVED: To provide technology for efficiently removing particles in a processing tank in short time in a soaking-type substrate processor. SOLUTION: Micro bubbles are supplied from a micro bubble generator 30 to processing liquid in the processing tank 10. The micro bubbles are removed in bubble removers 61 and 62 arranged in the middle of the route of a circulation system 40 of processing liquid. The particles in the processing tank 10 are adsorbed by the micro bubbles, are circulated with flow of processing liquid, and are removed with the micro bubbles in bubble removers 61 and 62. Since sizes of the micro bubbles are minute, they have wide surface areas as a whole, and the particles in processing liquid are efficiently adsorbed and removed. Nano bubbles can be used which are minuter than the micro bubbles. COPYRIGHT: (C)2006,JPO&NCIPI
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