发明名称 Crystal growth method of nitride semiconductor
摘要 The present invention relates to a method of manufacturing a nitride semiconductor, and, more particularly, a crystal growth method of a nitride semiconductor wherein a nitride semiconductor are grown on a nitride buffer layer including aluminums so that it is possible to improve electrical and crystalline characteristics. The invention may be formed on a sapphire substrate.
申请公布号 US2006118810(A1) 申请公布日期 2006.06.08
申请号 US20060325453 申请日期 2006.01.05
申请人 SHIN JOHNGEON 发明人 SHIN JOHNGEON
分类号 H01L21/205;C30B23/02;C30B25/02;C30B25/18;H01L21/20;H01L33/00 主分类号 H01L21/205
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