发明名称 |
Direct cooling pallet assembly for temperature stability for deep ion mill etch process |
摘要 |
Embodiments of the present invention are directed to a frame component of a pallet assembly. In one embodiment, the frame comprises a plurality of arms for retaining at least one carrier component. The frame further comprises at least one spring disposed upon one of the plurality of arms. The spring for applying pressure upon the carrier.
|
申请公布号 |
US2006118447(A1) |
申请公布日期 |
2006.06.08 |
申请号 |
US20040001798 |
申请日期 |
2004.12.02 |
申请人 |
CHEN PEI;GOITIA JORGE;HWANG CHERNGYE;LEUNG BIGAL;PEREZ DIANA;SUN YONGJIAN |
发明人 |
CHEN PEI;GOITIA JORGE;HWANG CHERNGYE;LEUNG BIGAL;PEREZ DIANA;SUN YONGJIAN |
分类号 |
B65D19/00 |
主分类号 |
B65D19/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|