| 摘要 |
PROBLEM TO BE SOLVED: To reduce transmission loss during the transmission of an optical signal in a method for controlling a gap width in an optical element. SOLUTION: A method for forming a gap includes a step for forming sidewalls 18, 20 in a microstructure and a step for determining a width d of a gap 16 between the sidewalls 18, 20. The gap 16 has a width d defined between the sidewalls 18, 20. Where the determined width d of the gap 16 is below the selected tolerance limits for the width d of the gap 16, at least one of the sidewalls 18, 20 is consumed to form a gap which meets the selected tolerance limits. COPYRIGHT: (C)2006,JPO&NCIPI |
