发明名称 PANEL CUTTING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a method for cutting two appropriate panels simultaneously by using a facing dual spindle type dicing device, even if an error occurs in panel arrangement or the like. SOLUTION: When arrangement positions of a plurality panels are measured and two panels are cut simultaneously by using first and second cutting blades from measured arrangement position information, the combination of the panels is calculated for minimizing angle deviation between the cutting line of the first cutting blade and that of the second cutting blade, and the two panels are cut simultaneously by using the first and second cutting blades based on information on the combination of the panels obtained from the calculation result. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006147720(A) 申请公布日期 2006.06.08
申请号 JP20040333534 申请日期 2004.11.17
申请人 DISCO ABRASIVE SYST LTD 发明人 KOYAMA MAKOTO
分类号 H01L21/301 主分类号 H01L21/301
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