| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical element for avoiding deformation of a microlens in the manufacture of the optical element having the microlens, and also to provide the optical element manufacturing method, optical communication apparatus, and electronic equipment. SOLUTION: The method is characterized by having a lens forming process in which a plurality of microlenses 11 are formed on a VCSEL wafer 100 and a coating process in which coating of a liquid protective member is applied, in a manner covering the microlenses 11, on the face where they are formed on the VCSEL wafer 100. COPYRIGHT: (C)2006,JPO&NCIPI
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