| 摘要 |
PROBLEM TO BE SOLVED: To efficiently form a micro lens with a wide light receiving face. SOLUTION: The above problem can be solved by comprising a process for forming a first optical transmissive film forming a column-like projection by spacing a prescribed interval on a semiconductor substrate, a process for forming a second optical transmissive film of the same material of the first optical transmissive film on the first optical transmissive film, and a process for irradiating argon ion toward the second optical transmissive film. COPYRIGHT: (C)2006,JPO&NCIPI
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