CARBON DIOXIDE NANOELECTRONIC SENSOR

摘要

An electronic system and method for detecting carbon dioxide is provided, using a nanostructure sensing device (CO₂ sensor). The CO₂ sensor is made up of a substrate and a nanostructure disposed over the substrate. The nanostructure may comprise a carbon nanotube, or a network of nanotubes. Two conductive elements are disposed over the substrate and electrically connected to the nanotube. A gate electrode may be positioned opposite the nanostructure. A functionalization material reactive with carbon dioxide is disposed on CO₂ sensor, and in particular, on the nanotube. The CO₂ sensor may be connected to an electrical circuit, which will respond to changes in CO₂ concentration in the ambient sensor environment.