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发明名称
Polishing composition
摘要
申请公布号
GB2420785(A)
申请公布日期
2006.06.07
申请号
GB20050021905
申请日期
2005.10.27
申请人
FUJIMI INCORPORATED
发明人
YASUHIDE UEMURA
分类号
C09G1/02;B24B37/00;C09K3/14;H01L21/304;H01L21/306
主分类号
C09G1/02
代理机构
代理人
主权项
地址
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