<p>On a front side of a plasma chamber there is a plasma outlet nozzle (6) and a supply of plasma gas. In the plasma chamber there is a plasma-forming element (2), which reduces the plasma chamber's inner volume used for forming plasma.</p>
申请公布号
EP1667199(A1)
申请公布日期
2006.06.07
申请号
EP20050026467
申请日期
2005.12.05
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
