| 摘要 |
A vacuum pump capable of using common vacuum pump components even if the vacuum pump is formed in the same structure as a vacuum pump suitably maintaining the temperature of electrical parts by efficiently cooling the electrical parts for rotating a rotor but the shape thereof is different in size from the vacuum pump. The vacuum pump (100) of the first invention is one which creates a vacuum state by rotating the rotor (101) to suck and discharge gas. The electrical parts (103a, 103b) for rotating the rotor are stored, a water- cooled tube (104) is buried in the wall of a stator column (102a) formed integrally with a base (102b), the water supply port side and the water drain port side of the water-cooled tube are branched into a plurality of parts, and the water-cooled tube is installed near the electrical part disposed near the center of the vacuum pump. The vacuum pumps (200, 300) of the second invention are those which create a vacuum state by rotating the rotors (201, 301) on which rotating blades are disposed to suck and discharge the gas. Pump cases (209, 309) are supported by screw pump stators (208, 308), and the water-cooled tube is buried in the wall of a stator column (202a).
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