发明名称 |
APPARATUS FOR MANIPULATION OF AN OPTICAL ELEMENT |
摘要 |
<p>The invention relates to an apparatus for manipulation of an optical element in up to six degrees of freedom with respect to a structure via at least three actuator devices. The actuator devices each have at least two force-controlled actuators, which each produce an effective force along one degree of freedom, with linking points of the actuator devices acting directly on the optical element.</p> |
申请公布号 |
EP1664880(A2) |
申请公布日期 |
2006.06.07 |
申请号 |
EP20040764887 |
申请日期 |
2004.09.07 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
MUEHLBEYER, MICHAEL;LIPPERT, JOHANNES |
分类号 |
G02B7/182;G03F7/20;(IPC1-7):G02B7/00 |
主分类号 |
G02B7/182 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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