发明名称 |
Carrier for holding an object to be polished |
摘要 |
To provide a diamond-like carbon coated carrier for holding an object to be polished used for double-sided polishing, and a manufacturing method therefor. A carrier for holding an object to be polished according to the present invention has a substrate whose entire surface is coated with diamond-like carbon. A method of the present invention includes coating the entire carrier surface with diamond-like carbon using a surface coating apparatus using plasma CVD. |
申请公布号 |
EP1574289(A3) |
申请公布日期 |
2006.06.07 |
申请号 |
EP20050004803 |
申请日期 |
2005.03.04 |
申请人 |
SPEEDFAM CO., LTD. |
发明人 |
YOSHIDA, AKIRA;SHIMIZU, TOSHIKUNI |
分类号 |
B24B37/20;B24B37/24;B24B37/27;B24B37/28;H01L21/304 |
主分类号 |
B24B37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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