PLASMA PRODUCING ELECTRODE AND PLASMA REACTOR

摘要

A plasma generating electrode according to the invention includes at least two opposing plate-shaped unit electrodes 2, each having a rectangular surface and four end faces, and a holding member 5 which holds at least one (fixed end 6) of a pair of parallel ends (pair of ends) of four ends of the unit electrode 2 corresponding to the four end faces, at least one of the opposing unit electrodes 2 being a conductive-film-containing electrode 8 including a ceramic body 3 and a conductive film 4, and a distance "a" (mm) from an edge of the conductive film 4 to an edge of the ceramic body 3 on the other pair of parallel ends (other pair of ends 9) of the four ends of the conductive-film-containing electrode 8 adjacent to the pair of ends and a thickness "c" (mm) of the ceramic body 3 satisfying a relationship "(c/2) ‰¤ a ‰¤ 5c". The plasma generating electrode 1 is effectively prevented from breaking due to thermal shock.