ILLUMINANT DISTRIBUTION EVALUATING METHOD, OPTICAL MEMBER MANUFACTURING METHOD, ILLUMINATION OPTICAL DEVICE, EXPOSURE APPARATUS, AND EXPOSURE METHOD

摘要

A manufacturing method which can control non-uniformity of the shape of micro refracting surfaces so that the illumination distribution of a desired precision can be obtained by means of an optical member such as a micro fly's-eye lens, for example. The method comprises a measurement step (S11) for measuring a two-dimensional illumination distribution generated by means of respective partial regions of the micro fly's-eye lens, a conversion step (S12) for converting the two-dimensional illumination distribution into a one-dimensional illumination distributions along a predefined direction, a setup step (S13A) for setting up the Chebyshev polynomials as the polynomials for evaluating the one-dimensional illumination distribution, an approximation step (S13B) for approximating the one-dimensional illumination distribution by the Chebyshev polynomials to obtain the coefficients of respective terms of the power polynomials, and a control step (S14) for controlling the non-uniformity of the shape of respective optical elements, using information relating to the coefficients of respective terms as a control indicator.