发明名称 Method and apparatus for manufacturing semiconductor device
摘要 A manufacturing line has a feeder (11) for feeding a hoop substrate (2), a bake oven (32) for heating and drying the fed hoop substrate (2), a die bonding device (34) for applying an adhesive to a predetermined position on the dried substrate (2) to mount an IC chip, and a cure oven (36) for bonding the IC chip to the hoop substrate (2) by heating and curing the adhesive.
申请公布号 EP1376658(A3) 申请公布日期 2006.06.07
申请号 EP20020020903 申请日期 2002.09.18
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TAKEMURA, HISAO
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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