| 摘要 |
The apparatus has a chuck (1) and a pallet (2), where the chuck comprises a lower portion and an upper portion. The lower portion of the chuck includes a circular base plate, a circular support plate and a damping unit (7) that is inserted between the circular base and support plates. The upper portion of the chuck comprises a cylindrical clamping housing that is fixed to the support plate by a set of screws. |
