OBJECT-TO-BE-TREATED CARRYING SYSTEM AND OBJECT-TO-BE-TREATED CARRYING METHOD

摘要

There is provided an object-to-be-treated carrying method using a carrying system including: a semiconductor handling device having a first passing/receiving mechanism and a first optically coupling parallel I/O communication interface (hereinafter, referred to as "first interface"); and an automatic carrying device having a second passing/receiving mechanism and a second optically coupling parallel I/O communication interface (hereinafter, referred to as "second interface"). The first passing/receiving mechanism and the second passing/receiving mechanism can successively pass and receive objects-to-be-treated one by one. Further, the first interface and the second interface can transmit/receive an optical signal as a control signal for controlling the first passing/receiving mechanism or the second passing/receiving mechanism. The method includes: a step of an optical communication between the first interface and the second interface so as to notify that it is possible to perform successive passing and reception between the automatic carrying device and the semiconductor handling device; and a step of successive passing/reception of the object-to-be-treated one by one between the first passing/reception mechanism and the second passing/reception mechanism.