发明名称 Structure for optical device and method of fabricating the same
摘要 Provided are a structure for an optical device and method of fabricating the same. The structure includes: a light scattering layer producing nanoparticles due to externally provided thermal energy; a protective layer protecting the light scattering layer; and a capping layer disposed between the light scattering layer and the protective layer. As the light scattering layer is formed of nitride-oxide, an energy gap is increased to make the structure suitable for a high-speed electronic circuit, and a desired stoichiometric ratio can be easily obtained. Also, the capping layer prevents crystalline mismatch, thus the non-uniformity of elements is inhibited to maintain a stoichiometric state. As a result, a high-integrated high-speed electronic circuit, which is excellent in uniformity and reproducibility, can be easily embodied.
申请公布号 EP1667242(A2) 申请公布日期 2006.06.07
申请号 EP20050105269 申请日期 2005.06.15
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 KIM, SANG HYEOB;KIM, KI CHUL;KIM, HYE JIN
分类号 C08K5/04;G02F1/00;H01G9/00;H01L21/00;H01L33/26;H01L33/48 主分类号 C08K5/04
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