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发明名称
METHOD AND APPARATUS FOR PRODUCING EXTREME ULTRAVIOLETT RADIATION OR SOFT X-RAY RADIATION
摘要
申请公布号
EP1665907(A2)
申请公布日期
2006.06.07
申请号
EP20040769907
申请日期
2004.09.01
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.;FRAUNHOFER-GESELLSCHAFT FUER ANGEWANDTE FORSCHUNGE.V.
发明人
JONKERS, JEROEN;VAUDREVANGE, DOMINIK MARCEL;NEFF, WILLI
分类号
H05G2/00;(IPC1-7):H05G2/00
主分类号
H05G2/00
代理机构
代理人
主权项
地址
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