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发明名称
Helical resonator type plasma processing apparatus
摘要
申请公布号
EP1530230(A3)
申请公布日期
2006.06.07
申请号
EP20040256330
申请日期
2004.10.14
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, DAE-IL;KIM, GOOK-YOON;MA, DONG-JOON;CHOI, SUNG-KYO
分类号
H01J37/32;H05H1/46;H01J7/24;H01L21/00;H01L21/205;H01L21/3065;H05H1/00
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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