POLISHING FLUID AND METHOD OF POLISHING,申请号KR20047019332-传众专利搜索

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发明名称	POLISHING FLUID AND METHOD OF POLISHING
摘要
申请公布号	KR100586299(B1)	申请公布日期	2006.06.07
申请号	KR20047019332	申请日期	2004.11.29
申请人		发明人
分类号	B24B37/00;C09G1/02;H01L21/321;H01L21/768	主分类号	B24B37/00
代理机构		代理人
主权项
地址

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