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发明名称
CLAMPING OF SEMICONDUCTOR WAFERS TO AN ELECTROSTATIC CHUCK
摘要
申请公布号
EP1665365(A1)
申请公布日期
2006.06.07
申请号
EP20040783464
申请日期
2004.09.08
申请人
AXCELIS TECHNOLOGIES, INC.
发明人
KELLERMAN, PETER;QIN, SHU;DIVERGILIO, WILLIAM
分类号
H01L21/683;H02N13/00;(IPC1-7):H01L21/68
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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